{"id":9612,"date":"2018-08-01T11:51:32","date_gmt":"2018-08-01T18:51:32","guid":{"rendered":"https:\/\/mbe.engineering.asu.edu\/?post_type=project&#038;p=9612"},"modified":"2024-06-25T15:45:38","modified_gmt":"2024-06-25T22:45:38","slug":"heterovalent-semiconductor-structure-mbe-growth-and-characterization","status":"publish","type":"post","link":"https:\/\/labs.engineering.asu.edu\/mbe-group\/2018\/08\/heterovalent-semiconductor-structure-mbe-growth-and-characterization\/","title":{"rendered":"Heterovalent Semiconductor Structure: MBE growth and characterization"},"content":{"rendered":"<p>MBE growth of various kinds of III-V and II-VI compound semiconductors.\u00a0 <br \/>\nA unique twin-chamber MBE system allows growth of any composition of III-V and II-VI alloys. Monolithic intergration material platform for various optoelectronic and electronic device applications.<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-9873\" src=\"https:\/\/mbe.engineering.asu.edu\/wp-content\/uploads\/2018\/01\/MBEgrowth_01.png\" alt=\"\" width=\"844\" height=\"324\" srcset=\"https:\/\/labs.engineering.asu.edu\/mbe-group\/wp-content\/uploads\/sites\/194\/2018\/01\/MBEgrowth_01.png 844w, https:\/\/labs.engineering.asu.edu\/mbe-group\/wp-content\/uploads\/sites\/194\/2018\/01\/MBEgrowth_01-300x115.png 300w, https:\/\/labs.engineering.asu.edu\/mbe-group\/wp-content\/uploads\/sites\/194\/2018\/01\/MBEgrowth_01-768x295.png 768w\" sizes=\"auto, (max-width: 844px) 100vw, 844px\" \/><\/p>\n<ul>\n<li>he II-VI chamber is capable of growing almost all possible combinations of materials including Zn, Se, Te, Mg, Be, and Cd. The Se and Te cells are valved cell to allow for precise control of composition and graded layers. In addition, it contains five different dopants (Al, Ga, P, Bi, and In) so that various doping profiles in different material systems can be studied.<\/li>\n<\/ul>\n<ul>\n<li>The III-V chamber contains various group III and V cells including Ga, In, Al, As, Sb and P, which can cover all the typical III-V combinations. The new Bi cell enhances our growth capability to bismide materials. The specially designed doping cell, which contains Be, Te and Si, can satisfy different doping requirements.<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n<p>&nbsp;<\/p>\n<p><span class=\"lineTitle\"><span class=\"firstletter\"><span class=\"main1\">S. Wang et al., J. of Cryst. Growth 311, 2116-2119 (2009).<\/span><\/span><\/span><\/p>\n<p><span class=\"main1\">II\u2013VI materials lattice matched to GaSb substrates are desirable for ultrahigh-efficiency multijunction solar cells. We report growth of ZnTe and ZnCdTe\/ZnTe quantum wells on undoped GaSb (1 0 0) substrates using MBE. Post-growth structural characterization using X-ray diffraction and high-resolution transmission electron microscopy reveals very low-defect density, i.e. high crystalline quality. Visible photoluminescence is observed from 10 to 300 K.<\/span><\/p>\n<p style=\"text-align: center\"><img loading=\"lazy\" decoding=\"async\" class=\"size-medium wp-image-9874 aligncenter\" src=\"https:\/\/mbe.engineering.asu.edu\/wp-content\/uploads\/2018\/01\/MBE-growth_02-300x239.png\" alt=\"\" width=\"300\" height=\"239\" srcset=\"https:\/\/labs.engineering.asu.edu\/mbe-group\/wp-content\/uploads\/sites\/194\/2018\/01\/MBE-growth_02-300x239.png 300w, https:\/\/labs.engineering.asu.edu\/mbe-group\/wp-content\/uploads\/sites\/194\/2018\/01\/MBE-growth_02.png 628w\" sizes=\"auto, (max-width: 300px) 100vw, 300px\" \/><span class=\"main1\">PL from a ZnCdTe\/ZnTe quantum well at different temperatures, with 300 K data shown in inset.<\/p>\n<p><\/span><\/p>\n<p style=\"text-align: left\"><span class=\"main1\">J. Fan, et al., J. of Cryst. Growth 323, 127-131 (2010). \u00a0<br \/>\n<\/span><span class=\"main1\">Thick ZnTe grown on III\u2013V substrates is proposed as a low-cost virtual substrate for electronic and optoelectronic device applications based on 6.1 \u00c5 compound semiconductors. This paper reports the growth of ZnTe samples on GaAs, InP, InAs and GaSb (0 0 1) substrates using MBE. XRD analysis indicates there are residual tensile strains in ZnTe epilayers due to the difference in thermal expansion coefficients between the ZnTe epilayers and the different substrate materials. HREM images reveal the presence of Lomer edge and 60\u00b0 partial dislocations at the interfaces between ZnTe epilayers and GaAs and InP substrates. Visible photoluminescence from ZnTe epilayers is observed from 80 to 300 K.<\/span><\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"size-full wp-image-9875 aligncenter\" src=\"https:\/\/mbe.engineering.asu.edu\/wp-content\/uploads\/2018\/01\/MBE-growth_03.png\" alt=\"\" width=\"726\" height=\"652\" srcset=\"https:\/\/labs.engineering.asu.edu\/mbe-group\/wp-content\/uploads\/sites\/194\/2018\/01\/MBE-growth_03.png 726w, https:\/\/labs.engineering.asu.edu\/mbe-group\/wp-content\/uploads\/sites\/194\/2018\/01\/MBE-growth_03-300x269.png 300w\" sizes=\"auto, (max-width: 726px) 100vw, 726px\" \/><\/p>\n<p><span class=\"main1\">(a) Low magnification HREM image of ZnTe\/GaAs (0 0 1) sample. (b) High magnification HREM image. (c) High-resolution image showing ZnTe\/GaAs interface with Burgers\u2019 circuit. S and F indicate the start and finish points for the Burgers\u2019 circuit analysis.<\/span><span class=\"main1\"><\/p>\n<p><\/span><\/p>\n<p><span class=\"main1\"><br \/>\nJ. Fan, et al., Applied Physics Letters 101 (12), 121909 (2012).<\/span><br \/>\n<span class=\"main1\">ZnTe\/GaSb distributed Bragg reflectors (DBRs) are proposed and demonstrated for mid-wave infrared (2\u20135 \u00b5m) optoelectronic applications. A series of ZnTe\/GaSb DBR structures have been successfully grown on GaSb (001) substrates using molecular beam epitaxy. X-ray diffraction results reveal smooth interfaces, uniform thicknesses, and low defect density. The DBR sample of seven k\/4 pairs has a peak reflectance as high as 99.0% centered at 2.5 \u00b5m with a 480-nm wide stopband.<\/span><\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"wp-image-9876 size-medium aligncenter\" src=\"https:\/\/mbe.engineering.asu.edu\/wp-content\/uploads\/2018\/01\/MBE-growth_04-300x212.png\" alt=\"\" width=\"300\" height=\"212\" srcset=\"https:\/\/labs.engineering.asu.edu\/mbe-group\/wp-content\/uploads\/sites\/194\/2018\/01\/MBE-growth_04-300x212.png 300w, https:\/\/labs.engineering.asu.edu\/mbe-group\/wp-content\/uploads\/sites\/194\/2018\/01\/MBE-growth_04-768x542.png 768w, https:\/\/labs.engineering.asu.edu\/mbe-group\/wp-content\/uploads\/sites\/194\/2018\/01\/MBE-growth_04.png 780w\" sizes=\"auto, (max-width: 300px) 100vw, 300px\" \/><\/p>\n<p style=\"text-align: center\">Measured and simulated reflectance spectra for a ZnTe\/GaSb DBR sample of seven k\/4 pairs.<\/p>\n<p>M. J. DiNezza, et al., physica status solidi (c), 9, 1720\u20131723 (2012).<br \/>\nZnTe PN homojunctions are fabricated using thermal diffusion of Al into a ZnTe film grown on lattice-matched GaSb substrates by molecular beam epitaxy. Rectifying J-V characteristics and the photovoltaic effect are observed which suggests that n-type ZnTe has been successfully achieved. Photoluminescence measurements of annealed ZnTe samples without the Al diffusion layer show strong band-edge luminescence at room temperature. This technique may lead to a better understanding of the n-type doping problem for ZnTe, and could lead to in-situ doping techniques and treatments.<\/p>\n<p>\nJ. Fan, L., et al., J. Vac. Sci. Technol. B, 30, 02B122 (2012).<br \/>\nThis paper reports high-quality GaSb grown on ZnTe using molecular beam epitaxy with a temperature ramp during growth. During growth, in situ RHEED shows rapid and smooth transition from ZnTe surface reconstruction to GaSb surface reconstruction. Post-growth structural characterization using x-ray diffraction and transmission electron microscopy reveals smooth interface morphology and low defect density. Strong photoluminescence emission is observed up to 200 K. The sample grown with a temperature ramp from 360 to 470 \u00b0C at a rate of 33 \u00b0C \/min showed the narrowest bound exciton emission peak with a full width at half maximum of 15 meV.<\/p>\n<p>\nJ. Fan, et al., J. of Crystal Growth 371 (1), 122\u2013125 (2013).<br \/>\nA series of GaSb\/ZnTe double-heterostructures proposed for laser diode applications was successfully grown by molecular beam epitaxy using GaSb (001) substrates. Post-growth characterization using high-resolution X-ray diffraction and transmission electron microscopy reveals low defect density and coherent interface morphology. Strong photoluminescence emission is observed at temperatures up to 200 K, indicating good optical properties.<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"size-full wp-image-9877 aligncenter\" src=\"https:\/\/mbe.engineering.asu.edu\/wp-content\/uploads\/2018\/01\/MBE-growth-04.png\" alt=\"\" width=\"1174\" height=\"546\" srcset=\"https:\/\/labs.engineering.asu.edu\/mbe-group\/wp-content\/uploads\/sites\/194\/2018\/01\/MBE-growth-04.png 1174w, https:\/\/labs.engineering.asu.edu\/mbe-group\/wp-content\/uploads\/sites\/194\/2018\/01\/MBE-growth-04-300x140.png 300w, https:\/\/labs.engineering.asu.edu\/mbe-group\/wp-content\/uploads\/sites\/194\/2018\/01\/MBE-growth-04-1024x476.png 1024w, https:\/\/labs.engineering.asu.edu\/mbe-group\/wp-content\/uploads\/sites\/194\/2018\/01\/MBE-growth-04-768x357.png 768w\" sizes=\"auto, (max-width: 1174px) 100vw, 1174px\" \/><\/p>\n<p style=\"text-align: center\">SEM image showing cross-section of GaSb\/ZnTe DH sample and PL spectra for GaSb\/ZnTe DH <br \/>\n\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0 sample measured with excitation density of 10 W\/cm2 at 13 K (in black), and 30 K (in red).<\/p>\n<p>&nbsp;<\/p>\n<p style=\"text-align: left\">\nH. Li, S. et al, J. of Crystal Growth 378, 145-149 (2013).<br \/>\nA calibration method for group V fluxes is demonstrated for the growth of InAsxSb1\u2212xalloys and strain-balanced InAs\/InAsxSb1\u2212x superlattices on GaSb substrates by MBE for IR optoelectronic device applications. Samples grown at 450 \u00b0C with Sb\/In flux ratios from 1.0 to 2.0 and As\/In flux ratios from 1.2 to 2.5 lead to Sb mole fractions ranging from 0.078 to 0.34. High structural and optical quality superlattices for Sb mole fractions up to 0.34 are verified by XRD and low-temperature PL measurements. When varying both Sb mole fraction and period, superlattice structures are demonstrated with low-temperature emission wavelengths ranging from 3.6 to 7.1 \u03bcm.<\/p>\n<p>\nS. Liu, et al., Appl. Phys. Lett. 102, 071903-071903-4 (2013).<br \/>\nMolecular beam epitaxial growth of strain-balanced InAs\/InAs1xSbx type-II superlattices on GaSb substrates has been investigated for substrate temperatures from 400\u00b0C to 450\u00b0 C. The Sb composition is found to vary linearly with substrate temperature at constant V\/III ratios. For samples grown at the optimized substrate temperature (410 \u00b0C), superlattice zero-order peak full-width at half-maximums are routinely less than 25 arc sec using high-resolution X-ray diffraction.<\/p>\n<p>\nJ. Fan, et al., J. Vac. Sci. Technol. B 31, 03C109 (2013).<br \/>\nThis paper reports the molecular beam epitaxial growth and characterization of high-reflectivity and broad-bandwidth distributed Bragg reflectors (DBRs) made of ZnTe\/GaSb quarter-wavelength (\u03bb\/4) layers for optoelectronic applications in the midwave infrared spectral range (2-5 \u00b5m). Post-growth characterization using high-resolution x-ray diffraction, atomic force microscopy, and transmission electron microscopy reveals smooth surface morphology, low defect density, and coherent interfaces. Reflectance spectroscopy results show that a DBR sample of seven \u03bb\/4 pairs has a peak reflectance as high as 99.0% centered at 2.56 \u00b5m with a bandwidth of 517 nm.<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"size-medium wp-image-9878 aligncenter\" src=\"https:\/\/mbe.engineering.asu.edu\/wp-content\/uploads\/2018\/01\/MBE-growth-05-300x226.png\" alt=\"\" width=\"300\" height=\"226\" srcset=\"https:\/\/labs.engineering.asu.edu\/mbe-group\/wp-content\/uploads\/sites\/194\/2018\/01\/MBE-growth-05-300x226.png 300w, https:\/\/labs.engineering.asu.edu\/mbe-group\/wp-content\/uploads\/sites\/194\/2018\/01\/MBE-growth-05-768x578.png 768w, https:\/\/labs.engineering.asu.edu\/mbe-group\/wp-content\/uploads\/sites\/194\/2018\/01\/MBE-growth-05.png 816w\" sizes=\"auto, (max-width: 300px) 100vw, 300px\" \/><\/p>\n<p>Experimental reflectance spectra for the ZnTe\/GaSb DBR samples with different number of k\/4 pairs (N= 1, 2, 4, 7).<\/p>\n","protected":false},"excerpt":{"rendered":"<p class=\"mb-2\">MBE growth of various kinds of III-V and II-VI compound semiconductors.\u00a0 A unique twin-chamber MBE system allows growth of any composition of III-V and II-VI alloys. Monolithic intergration material platform for various optoelectronic and electronic device applications. he II-VI chamber is capable of growing almost all possible combinations of materials including Zn, Se, Te, Mg,&#8230;<\/p>\n","protected":false},"author":365,"featured_media":9614,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[12,13],"tags":[],"class_list":["post-9612","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-mbe-gc","category-research"],"acf":[],"_links":{"self":[{"href":"https:\/\/labs.engineering.asu.edu\/mbe-group\/wp-json\/wp\/v2\/posts\/9612","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/labs.engineering.asu.edu\/mbe-group\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/labs.engineering.asu.edu\/mbe-group\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/labs.engineering.asu.edu\/mbe-group\/wp-json\/wp\/v2\/users\/365"}],"replies":[{"embeddable":true,"href":"https:\/\/labs.engineering.asu.edu\/mbe-group\/wp-json\/wp\/v2\/comments?post=9612"}],"version-history":[{"count":0,"href":"https:\/\/labs.engineering.asu.edu\/mbe-group\/wp-json\/wp\/v2\/posts\/9612\/revisions"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/labs.engineering.asu.edu\/mbe-group\/wp-json\/wp\/v2\/media\/9614"}],"wp:attachment":[{"href":"https:\/\/labs.engineering.asu.edu\/mbe-group\/wp-json\/wp\/v2\/media?parent=9612"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/labs.engineering.asu.edu\/mbe-group\/wp-json\/wp\/v2\/categories?post=9612"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/labs.engineering.asu.edu\/mbe-group\/wp-json\/wp\/v2\/tags?post=9612"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}