{"id":9572,"date":"2018-01-31T10:09:04","date_gmt":"2018-01-31T17:09:04","guid":{"rendered":"https:\/\/mbe.engineering.asu.edu\/?post_type=project&#038;p=9572"},"modified":"2024-06-25T15:45:41","modified_gmt":"2024-06-25T22:45:41","slug":"clean-room","status":"publish","type":"post","link":"https:\/\/labs.engineering.asu.edu\/mbe-group\/2018\/01\/clean-room\/","title":{"rendered":"Processing\/Clean Room"},"content":{"rendered":"<p>Semiconductor device processing is carried out in a 4,000 square foot class-100 cleanroom in the <a href=\"https:\/\/nanofab.engineering.asu.edu\/\">ASU NanoFab<\/a> facility.<\/p>\n<h3>List of major equipments and systems<\/h3>\n<ul>\n<li>Tempress 8-stack furnace tubes configured for: wet and dry thermal oxidation; poly-silicon, low temperature oxide and silicon nitride CVD; phosphorus and boron doping; and the annealing of 4\u201d silicon wafers.<\/li>\n<li>Heidelberg DWL 66 Mask Making and Optical Direct-Write<\/li>\n<li>Karl Suss MJB3 Contact Aligner<\/li>\n<li>EVG 620 Front and Backside Aligner<\/li>\n<li>JEOL JBX-6000FS\/E Electron Beam Lithography System<\/li>\n<li>Sloan\/Varian 841 Electron Beam Evaporator<\/li>\n<li>Torrvac VC-320 Electron Beam Evaporator<\/li>\n<li>CHA 600-SE Electron Beam Evaporator<\/li>\n<li>CHA 1000-SE E-beam Evaporator<\/li>\n<li>Edwards Auto306 Thermal Evaporator<\/li>\n<li>MRC-8617 RF Sputter Coater<\/li>\n<li>Woollam Ellipsometer WVASE32<\/li>\n<li>Rudolph AutoEL II Ellipsometer<\/li>\n<li>Dektak IIA Profilometer<\/li>\n<li>Filmetrics F20<\/li>\n<li>Hitachi S4700 Field Emission Scanning Electron Microscope with Energy Dispersive x-ray Analysis<\/li>\n<li>PlasmaQuest 333 RPCVD<\/li>\n<li>Tamarack 180M<\/li>\n<li>Heat Pulse 610 RTP<\/li>\n<li>Jipelec<\/li>\n<li>STS ICP Advanced Silicon Etch (ASE)<\/li>\n<li>STS ICP All General Etch (AGE)<\/li>\n<li>PlasmaLab \u00b5 P80 Reactive Ion Etcher<\/li>\n<li>Tegal PlasmaLine 411 Plasma Asher<\/li>\n<li>EVG620 Mask Aligner<\/li>\n<li>EVG520HE Bonder and Semi-automated Hot Embossing<\/li>\n<\/ul>\n<hr \/>\n<p><em><strong>NOTICE<\/strong>: All equipment is available to external users at reasonable cost.\u00a0 Please contact us for further details.<\/em><\/p>\n","protected":false},"excerpt":{"rendered":"<p class=\"mb-2\">Semiconductor device processing is carried out in a 4,000 square foot class-100 cleanroom in the ASU NanoFab facility. List of major equipments and systems Tempress 8-stack furnace tubes configured for: wet and dry thermal oxidation; poly-silicon, low temperature oxide and silicon nitride CVD; phosphorus and boron doping; and the annealing of 4\u201d silicon wafers. Heidelberg&#8230;<\/p>\n","protected":false},"author":365,"featured_media":9545,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[6,9],"tags":[],"class_list":["post-9572","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-facilities","category-processing"],"acf":[],"_links":{"self":[{"href":"https:\/\/labs.engineering.asu.edu\/mbe-group\/wp-json\/wp\/v2\/posts\/9572","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/labs.engineering.asu.edu\/mbe-group\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/labs.engineering.asu.edu\/mbe-group\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/labs.engineering.asu.edu\/mbe-group\/wp-json\/wp\/v2\/users\/365"}],"replies":[{"embeddable":true,"href":"https:\/\/labs.engineering.asu.edu\/mbe-group\/wp-json\/wp\/v2\/comments?post=9572"}],"version-history":[{"count":0,"href":"https:\/\/labs.engineering.asu.edu\/mbe-group\/wp-json\/wp\/v2\/posts\/9572\/revisions"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/labs.engineering.asu.edu\/mbe-group\/wp-json\/wp\/v2\/media\/9545"}],"wp:attachment":[{"href":"https:\/\/labs.engineering.asu.edu\/mbe-group\/wp-json\/wp\/v2\/media?parent=9572"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/labs.engineering.asu.edu\/mbe-group\/wp-json\/wp\/v2\/categories?post=9572"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/labs.engineering.asu.edu\/mbe-group\/wp-json\/wp\/v2\/tags?post=9572"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}