Growth

MBE chamber

MBE chambers

The MBE laboratory is equipped with four solid source MBE chambers for growing III-V and II-VI semiconductor materials. All chambers are equipped for reflection high energy electron diffraction (RHEED) characterization and are fully computer controlled. VG V80H (Chamber A and B) The group’s oldest system is a VGV80H twin-chamber MBE system. Chamber A is dedicated…